SAN JOSE — Immersion lithography is supposed to be the savior for the semiconductor industry, but is the technology is all wet? While the lithography-tool vendors are hyping the technology, Intel Corp ...

In 2003 immersion lithography went from an academic curiosity to the likely next means of patterning integrated circuits. It was unprecedented progress for a technology that streaked past myriad other ...

B. W. Smith, J. Zhou, "Snell or Fresnel – The influence of material index on hyper NA lithography" Proc. SPIE 6520, (2007) paper J. Zhou, N. Lafferty, B. W. Smith, J. H. Burnett, "Immersion ...

New data on the properties of potential "liquid lenses" compiled by the National Institute of Standards and Technology (NIST) could help the semiconductor industry continue to shrink feature sizes on ...

Demonstrating significant progress in all aspects of the technology, 193nm immersion lithography is on track for insertion into volume manufacturing, with good prospects for extendibility to ...

Former TSMC co-CEO Shang-yi Chiang and renowned immersion lithography expert Burn Lin have weighed in on TSMC's dominance in the global semiconductor market. Chiang noted that competitors... Wednesday ...

Immersion lithography, phase shift masks and other techniques will push sub-wavelength lithography, but firms should carefully consider the economic trade-off. The warning came from Andre Hawryliw, ...

VELDHOVEN, the Netherlands, 29 September 2015 - ASML Holding NV (ASML) today announced the first shipment of its new TWINSCAN(TM) NXT:1980Di immersion lithography system to support increasingly ...

Burn J. Lin, TSMC's Vice President of Research and Development, has been awarded the 2013 IEEE Jun-ichi Nishizawa Medal for outstanding contributions to material and device science and technology for ...

Intel plans to do 22 nm in 2011. EUV will not be ready for volume production in 2011. Maybe a year later, in 2012 and Intel won’t wait for it. Intel intends to extend 193 nm immersion lithography with ...

Nikon will try to claw back lithography customers by selling argon fluoride (ArF) tools for less than the market leader, ASML ...